8. A specimen-exchange device for an ultra-high vacuum atom-probe field-ion microscope
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چکیده
منابع مشابه
A Time-of-flight Atom-probe Field-ion Microscope for the Study of Defects in Metals
An ultra-high vacuum time-of-flight (TOF) atom-probe field-ion microscope (FIM) specifically designed for the study of defects in metals is described. Performance experiments show that this instrument can clearly resolve the seven stable isotopes of molybdenum, the five stable isotopes of tungsten, and the two stable isotopes of rhenium in a tungsten-25at.% rhenium alloy. The entire process of ...
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Figure 2. Angular distributions of inelastic scattering around the undiffracted beam and around a beam diffracted through an angle a. The shaded area represents the contribution from the diffracted beam to the intensity collected by an on-axis aperture of semi-angle A3. [6] Egerton, R. F., Electron Energy Loss Spectroscopy in the Electron Microscope, Plenum Press, New York (1986). [7] Steele, J...
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Atom-probe tomography (APT) is a quantitative technique that permits three-dimensional (3-D) spectroscopic characterization of interfaces and other nanometer-scale features within a material. Specimens for atom-probe tomography (APT) analysis of semiconductor devices and nanostructured materials are typically fabricated employing a focused ion beam (FIB) instrument [1 3] or a dual-beam FIB inst...
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BACKGROUND The resolution in electrostatic force microscopy (EFM), a descendant of atomic force microscopy (AFM), has reached nanometre dimensions, necessary to investigate integrated circuits in modern electronic devices. However, the characterization of conducting or semiconducting power devices with EFM methods requires an accurate and reliable technique from the nanometre up to the micromet...
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Recent progress in atom probe field ion microscopy (APFIM) and its applications to nanoscale microstructural studies of metallic materials are reviewed. By employing a three dimensional atom probe (3DAP), it is possible to map out elemental distributions in the real space with almost an atomic resolution, and chemical analysis of interfaces and nanoparticles can be made with improved accuracy i...
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ژورنال
عنوان ژورنال: Vacuum
سال: 1978
ISSN: 0042-207X
DOI: 10.1016/0042-207x(78)90009-x